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Brief description of your activity focus LMSE offers complete research and development services in the field of silicon semiconductor devices, MEMS, microfluidics and piezoelectric devices
Details about Expertise / Competences / Technologies LMSE has research and development activities in the field of silicon semiconductor devices, MEMS and microfluidics, from theoretical analysis and modeling, to the development of prototype test structures and devices, their characterization and optimization.
LMSE field of research covers several topics:
-Membrane sensor structures
-Piezoelectric Micropumps and Valves
-Cantilever actuators
-Micro-optical benches
-Silicon optical sensors
-Silicon radiation sensors
-Microreactors
-Nerve-root retractor
-Muscle contraction sensor
-Advanced 3D fully-coupled FEM numerical simulations
-Smart sensors, electronics and signal conditioning
R&D services are available such as modeling (process & device FE simulation), characterization (various measurements and testing), single semiconductor processing steps development (lithography, diffusion, metalization, depositions, DRIE, wet micromachining etc.) and complete microsystems solutions.
LMSE is open for any kind of cooperation with other research institutions and industrial partners. |
